Fabmatics launches Mobile Robot for Automated Reticle Handling

Fabmatics

Aug 30, 2024 8:37:48 AM

Fabmatics, a leader in semiconductor automation solutions, proudly announces one of its newest autonomous mobile robot (AMR), the HERO Scout. This innovative AMR is specifically designed for flexible transport and safe reticle handling automation, crucial for the efficient management of reticle pods used in semiconductor production. Reticle pods are used to transport high-quality photomasks, which are key components for manufacturing microchips.

Addressing the Challenges in Photolithography

In the highly complex and investment-intensive lithography process of semiconductor manufacturing, reticles are used to project the finest micro- and nanostructures onto the light-sensitive layer on the wafer surface. This allows up to 50 lithography layers to be created throughout the entire process – a complex and time-consuming procedure that forms a decisive basis for manufacturing microchips.

This production area places high demands on process control, such as double exposures, special machine assignments and complex scheduling. The wafers must meet the right photomasks (reticles) at the right time at the exposure machines. Downtime or waiting times at the valuable lithography machines are unacceptable. The most expensive area of the factory must run continuously and flawlessly in order for optimizing its equipment and for achieving maximum performance.

Mask logistics play an important role here because they have to function in parallel with wafer logistics in a completely synchronized and stable manner. However, manual reticle handling can lead to inefficiencies and errors that impair the entire production process. Additionally, ergonomically unfavorable reticle pod loading points make the work of system operators more difficult and pose more of a risk for accidents.

The Need for Automated Reticle Handling and Transport

In an environment where downtime and waiting times are unacceptable, automation is essential. The HERO Scout addresses this need by ensuring continuous and error-free operations for optimizing the entire lithography process, that ultimately enhances overall equipment efficiency (OEE) and adherence to production schedules.

Introducing the HERO Scout: A flexible automation solution for reticle pods in the cleanroom

The newest member of the HERO Mobile Robots family the HERO Scout is a state-of-the-art AMR that redefines reticle handling in semiconductor cleanrooms. Equipped with a highly sensitive cobot arm, the HERO Scout can manage the loading and unloading of mask load ports at various heights, even in ergonomically challenging positions and confined spaces.

Key Features & Benefits

6-axis Cobot for Flexible Reticle Handling: The HERO Scout’s cobot arm provides unmatched flexibility, ensuring precise and safe handling of reticle pods.
Longest Reach in its Class: Being capable of reaching heights from 200 mm to 1,700 mm, it manages high load ports effortlessly.
Compact and Cleanroom-Compatible: As the smallest AMR of its kind, the HERO Scout is designed to navigate narrow spaces, making it ideal for confined factory areas.
Innovative Sensor and Camera Technology: Being equipped with 3D cameras for obstacle detection and avoidance, the HERO Scout operates safely and autonomously.
Ultra-Clean Design: Being certified for ISO 2 / US FED 0.1 cleanroom standards, it ensures contamination-free operations.

Enhancing Efficiency and Safety

The HERO Scout uses the Hero family’s proven inductive on-the-fly charging technology to minimize downtime while charging. With two buffer places for efficient swap handling and adaptive speed control, it guarantees safe and fast transport of reticle pods. Its SLAM and auto-teaching capabilities ensure quick setup and adaptation to production changes, reducing the time required for commissioning and maintenance.

Ensuring Operator Safety

The HERO Scout is equipped with advanced sensor and camera technology to ensure safe operations in environments where humans and machines work closely together. Its sensitive cobot arm and Fail Safe over EtherCAT (FsoE) technology enhance safety, e.g. by reducing response times for emergency stop commands and other safety precautions.

Conclusion

The HERO Scout is set to revolutionize reticle handling and transport in semiconductor manufacturing, offering flexibility, safety, and efficiency. With its state-of-the-art technology, compact design, and robust features, the HERO Scout is the ideal solution for modern semiconductor fabs aiming to take their reticle logistics, lithography scheduling and associated machine efficiency to the next level.